Fabrication Methods for SU-8 Optical Interconnects in Plastic Substrates

Ultrathick SU-8 fabrication for microreciprocating engines

Nianjun Sun Beijing Aeronautical Manufacturing Technology Research Institute P.O. Box 863 Beijing 100024 China Abstract. We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power ...

Fabrication of Circuits on Flexible Substrates Using Conductive SU-8 for Sensing Applications

This article describes a new low-cost rapid microfabrication technology for high-density interconnects and passive devices on flexible substrates for sensing applications. Silver nanoparticles with an average size of 80 nm were used to create a conductive SU-8 mixture with a concentration of wt 25%. The patterned structures after hard baking have a sheet resistance of 11.17 Ω /□. This conductiv...

Fabrication of multi-layer SU-8 microstructures

The fabrication of multi-level SU-8 microstructures using multiple coating and exposure steps and a single developing step has been achieved for up to six layers of SU-8. Alternating layers of SU-8 2010 (thin) and SU-8 2100 (thick) photoresist films were spin coated, followed by soft-bake, ultraviolet (UV) exposure and post-exposure bake steps. The multiple SU-8 layers were simultaneously devel...

SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

Here, we present the activities within our research group over the last five yearswith cantilevers fabricated in the polymer SU-8. We believe that SU-8 is an interestingpolymer for fabrication of cantilevers for bio/chemical sensing due to its simple processingand low Young's modulus. We show examples of different integrated read-out methodsand their characterisation. We also show that SU-8 can...

Fabrication of Su-8 Microstructures for Analytical Microfluidic Applications